Scanner Mechanism
Scanner-Mechanism
- Dimensioning in respect with ECSS standards
- Vacuum compatibility : 1.10-7mbar
- Operational temperature range : -55°C / +45°C (qualification level)
- Vibration and shock environment : sinus 30g - random 33g RMS - shock 360g
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: Scanner Mechanism
µVMR 12-80
Micro-positioning
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: µVMR 12-80
5 axis Sample Holder
5 axis sample holder
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: 5 axis Sample Holder
Bender
Bi-directional 1D or 2D bending
- Research on ultrathin chips
- Property analysis under vacuum
- Bi-directional 1D or 2D bending
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: Bender
Micro-positioning stage XY 2-1000-10
XY stage sample holder
- The XY positioner is made up of 2 translation stages (Tx and Ty)
- Driven by a stepping moter (2 phases)
- The translational movement generated
- Prestressed linear ball guidance
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: Micro-positioning stage XY 2-1000-10
Vacuum chambers of PCNC
Soldered chambers
- Chamber dimension: 8600 x 1600 x 3200 mm
- Volume : 6m3
- Internal pressure: 1.10-6 mbar
- Leakage Rate: < 6.10-7 mbar.l/s
- Manufacturing & control under CODAP V2000 cat B
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: Vacuum chambers of PCNC
Vacuum chamber
Multi-axis positioner Nanoscopium
- 2 vacuum chambers
- Inner Dimensions: 350 x 600 x370 mm& 450x 950 x490 mm
- Equipped with 2 positioners with high accuracy (inside)
- Positioner isolated from the chamber in order to dissociate the vibrations and thermal expansion
µTMP 16
Miniature micro-positioning stage
- Travel: 16 mm
- Aluminum finish
- Minimum dimensions: 40x40x18, tray 25x25
- Application: whether or not to place a filter in a laser beam
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: µTMP 16
µTMP C- 6-200-10
Miniature micro-positioning stage
- Stroke: 6mm (+/-3mm)
- Payload: 10N
- The smallest of the range
- UHF version
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: µTMP C- 6-200-10
µTMP 32
Compact micro-positioning stage
- Minimum dimensions: 25x25x15 mm
- Stroke: up to 20 mm
- Resolution : 25nm (minimum)
- Irreversible screw-nut system with backlash adjustment device
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: µTMP 32
Common Reference Gate
Optical suport
- LMJ equipment
- Position the Common Reference with great precision in the center of the experiment chamber
- Equipped with a 6 DDL positioner
- Compatible: secondary vacuum, contaminated environment
- Resists EMC constraints
- Safety management: safety PLC
Rotational stage
Rotational movements along 3 axes
- Generates rotational movement along 3 axes in a small footprint
- Equipped with a swivel plate actuated by 3 micrometric stops
- Stops fitted with a 90 ° angle gear
- Sensitivity of the rotational movement of 1µrad
- +/- 1mm stroke on each adjustment axis
- Available in motorized version
µTRM rotary stage
- Micro stage
- Hybrid stepper motor
- Device: position stability without energy
- Race: Multiturn
- Resolution: 5µrad min
- Speed: up to 20°/s
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: µTRM rotary stage
µTRMA rotary stage 360-1570-10
Optics, sensors and laser alignment
- High precision reverse rotation
- Small size
- Speed: up to 15 rpm
- Resolution: 1.57 mrad/step
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: µTRMA rotary stage 360-1570-10
TRMA rotary stage
- Stepper gearmotor
- Load capacity: 1500N
- Very precise rotational movements
- Accuracy: 35µrad on 5 °
- Speed: 0.2 ° / s
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: TRMA rotary stage
TRM rotary stage
- Stepper gearmotor
- Backlash device: position stability without energy
- Race: multi-laps
- Resolution: 5µrad min
- Speed: up to 10°/s
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: TRM rotary stage
VMP-60 Micro-positioning actuator
Space applications
- High axial and radial stiffness
- Thermo-mechanic stability
- Driven by stepper motor
- Compatible with particular environments: UHV, -80°C to + 60°C, CO² atmosphere, shocks, ...
- Travel: 60mm
- Résolution on displacement: 50nm / pas
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: VMP-60 Micro-positioning actuator
Stage TMP 4-50-200
Available with magnetic encoder
- Load capacity: 50N
- Stepper gear motor
- Ball bearing without recirculation
- Travel range: 4mm
- Resolution: 50nm / motor step
- ISO 6
- Hardened Nuclear
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: Stage TMP 4-50-200
XSZ micro-positioning stage
3 axes: Tx Ts Tz
- Precise positioning of optics or sensors
- Composed of 3 stages: 2 translation stages (Tz and Tx) and 1 TMP actuator (Ts)
- 2-phase hybrid stepper motorization: 200 steps/lap
- Position stability excluding power supply
- Each stage is equipped with an incremental linear encoder
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: XSZ micro-positioning stage
Stage TMP 29-25-200
Ultra rigid version
- Load capacity : up 200N
- Stepper gear motor
- Linear recirculating ball bearing
- Travel range: +/- 14.5mm
- Resolution: 25nm / motor step
- ISO 6
- Hardened nuclear
- Available for various strokes
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: Stage TMP 29-25-200
TMP ER 25-1000-50
Ultra low height
- Irreversible linear motion
- Stepper gear motor
- Croosed roller ball bearing without recirculation: precise and smooth motion
- Travel range : 25 mm
- Resolution : 165nm / motor steps
- XYZ configuration available
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: TMP ER 25-1000-50
Stage TMP 50-1000-100
XY configuration available
- Hybrid stepper gear motor
- Irreversible linear motion
- Linear recirculating ball bearing: precise and smooth motion
- Travel range: 50mm
- Resolution: 625 nm/ motor step
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: Stage TMP 50-1000-100
TMP 135-6000-100 Translation stage
XYZ configuration available
- Stepper gearmotor
- Linear guide with recirculating balls
- Stroke: 135mm
- Resolution: 6.25 µm / motor step
- Exists in different races
- LMJ version available
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: TMP 135-6000-100 Translation stage
TMP XY 400-4-1000
- 2 axis translation unit
- Translation stage: Stroke: 400 mm // Straightness: +/- 10µm over 400mm
- Stroke Micro positioning table: 2mm
- Stroke: 2 mm
- Accuracy: 1 µm
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: TMP XY 400-4-1000
OEM motorized stage
Integration into an optomechanical device
- Open loop stepper motorization
- Stroke: 20mm
- Weight 45g (excluding cable)
- Possibility of XY or XYZ mounting
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: OEM motorized stage
TMR 30-20
Robotized micrometric stage
- Translation movement in XYZ
- Displacement by screw-nut system
- Maximum stroke: 30mm
- Maximum speed: 3 mm/s
- Mass: 510g
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: TMR 30-20
TMR 150-100
Sealed motorized stage
- Use in aggressive environments
- Stroke: 150mm
- Vertical load capacity: 100N
- Horizontal load capacity: 400N
- IP68 waterproof
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: TMR 150-100
NLS II : XY
Nanometric positioning stage
- Motorization: electromagnetic motor without iron
- Open or closed loop control
- Compatible with vacuum and ultra-vacuum application (10-9 mbar)
- Nanometric resolution
- Straightness: 1µrad / ± 30 nm (5 nm stroke)
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: NLS II : XY
4 axis motion controller
DC motor with optical encoder
- Absolute and relative move
- Motion motor asserved on optical encoder integrated into the actuator
- Limit switches (positive and negative) can be reversed or inhibited by software configuration
- Power supply: +3.3V, +5V, -5V et +12V
- Communication: CAN et RS485 ( ASCII)
- Weight: 350g
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: 4 axis motion controller
2-axis control box
Stepper motors without encoder
- Autonomic 2-axis system, controls up to 2 actuators
- 4-wire bipolar stepper motors
- Power supply: + 24V ± 10% (AC/DC converter supplied)
- Dimensions: AC/DC converter: 50 x 115 x 35mm
Steering rack – CAN
CAN control
- With incremental encoder reading & ENDAT
- 16 stepper motors
- CAN bus, Ethernet or USB control
- Absolute and relative displacement
- Motor advance in full or half steps
- Bipolar type motor
- Dimensions: 450mm x 3U x 210mm
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: Steering rack – CAN
Steering rack – PROFINET
PROFINET control
- With incremental encoder reading and ENDAT
- 12 stepper motors
- Absolute and relative displacement
- Motor advance in full or half steps
- Bipolar type motor
- Dimensions : 450mm x 3U x 210mm
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: Steering rack – PROFINET
AXOC multi-axis positioner
For focusing mirrors
- KB positioner
- Compact, high rigidity and high stability
- Compatible with Ultra vacuum
- 2 positioning systems: one with 6 axes and the second with 5 axes
- Strocke: +/- 5mm
- Resolution: 5µm
- Accuracy: 10µm
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: AXOC multi-axis positioner
2-axis motion controller box
Stepper motor without encoder
- Autonomic system with 2-axis controller
- Each axis is independent and has an analog control input
- Allows external position control
- Ability to manage limit switch and original sensor
- Dimensions: 290 x 180 x 120 mm
- Communication: RS232 (ASCII frame)
- Power supply: 85-240VAC / 50-60Hz
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: 2-axis motion controller box
Communication gateway
Profinet / IO to Can
- Bidirectional interface gateway between PROFINET network and CAN bus
- Evolutionary structure: great personalization to customer requests
- Internal buffer: high speed data transmission
- Power supply: 24VDC / 100mA (VDC)
- Dimensions: Rackable Europe format 100 x 160 mm
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: Communication gateway
Control board
Stepper motor with encoder
- Bipolar stepper motor with single axis encoder interface
- Absolute and relative displacement
- Motor displacement in full steps or half steps
- Codeur incrémental ou absolu (ENDAT)
- Power suppy: 24 V
- Control card by CanOpen
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: Control board
Control board
2 stepper motors
- Bipolar stepper motor
- 2 limit switch inputs (positive and negative) which can be reversed
- Control: CAN bus use with CanOpen protocol for control of cards
- Control: USB gateway for control via a provided Window interface
- European format (100 mm x 160 mm) rackable
2 axis controller
For stepper motor without encoder
- Bipolar stepper motor
- Limit switches (positive and negative can be reversed/deactivated)
- Absolute and relative movement
- Motor displacement full step, 1/2 step, 1/4 step or 1/16pas
- Dimensions: 130 x 50 x 20mm
- Power supply: + 12-24VDC ± 5% 3A
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: 2 axis controller
Ball joint 350-50
Ball joint 3 axes of movement
- Liaises with moved items
- Without backlash
- Excellent mechanical strength ensuring support security
- ISO 6
- Available in reduced load version
- Great stiffness along the 3 axes of movement
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: Ball joint 350-50
Nanoscopium multi-axis positioner
For focusing mirrors
- Kinematics suitable for minimizing parasitic movements
- Support and water cooling of mirrors
- High rigidity and high stability
- Compatible with Ultra Vacuum (UHV 10-10 mbar)
- 5 DDL: 3 rotations and 2 translations
- Stroke: ± 4mm
- Resolution: < 100nm
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: Nanoscopium multi-axis positioner
3 axis positioner
For targets
- High precision movements
- Settings according to θX, θY et θZ
- 2 orientation actuators and 1 rotation actuator
- Stroke ±5° (θX, θY et θZ)
- Resolution: 50µrad
- Accuracy: ±50µrad
- Cleanliness class (10, 100, 1000 or 10 000) and Vacuum (10-6 mbar)
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: 3 axis positioner
Insertor
Insert, position and orient an object in a vacuum enclosure
- Equipped with a 6-degree positioner of high precision
- Maximum mass of the object to insert: 2,5 kg
- Vacuum operation
- Electromagnetic and nuclear compatible hardening
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: Insertor
VMP 30-30-P450 positioner
Micro-positioning
- Hybrid stepper motor
- Irreversible displacement
- Anti-rotation rod system
- Stroke: 30mm
- Repetability: <1µm RMS
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: VMP 30-30-P450 positioner
µVMP4-100-60 positioner
Micro-positioner
- Small footprint
- Irreversible displacement
- Rod anti-rotation system
- Pushing force: up to 60N
- Stroke: +/-2mm
- Resolution: 100 nm
- Compatible: UHV, baking 120°C
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: µVMP4-100-60 positioner
µVMR 4-15-5 positioner
Miniature electric positioner
- Stroke: 15mm
- Motorization: Coreless DC, 5 Vdc
- Nominal speed: 3 to 5mm/s
- Nominal force: 2N (in tension and in push)
- Max force: 5N (in tension and in push)
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: µVMR 4-15-5 positioner
µVMR 7-20 actuator
Micro DC electric actuator
- Small footprint
- Stroke: 7mm
- Rod anti-rotation system
- Voltage from -5 to + 5Volts CC
- CC Motoreductor
- Rod Ø8
- Tapping M4
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: µVMR 7-20 actuator
µVMR20-50 12V positioner
Robotic miniature positioner
- Small footprint
- Irreversible displacement
- Rod anti-rotation system
- Piloting in speed regulation
- Pushing force: up to 100N
- Maximum axial locking force: up to 70N
- Stroke: 20mm
- Compatible: all stainless steel, waterproof rod
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: µVMR20-50 12V positioner
µVMR20-50 24V positioner
Robotic miniature positioner
- Small footprint
- Irreversible displacement
- Rod anti-rotation system
- Piloting in speed regulation
- Pushing force: up to 60N
- Stroke: 20mm
- Resolution: 1.35µm par imp
- Compatible: all stainless steel, waterproof rod
µAME 12 – Space actuator
Miniature effort micrometric actuator
- Patented design
- Generates high precision bidirectional forces
- Coupling without parasitic friction
- Stable and constant maintenance of effort excluding energy
- Compatible with spatial constraints
- Effort: ± 12N
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: µAME 12 – Space actuator
µAME 30 actuator
Micrometric force actuator
- Patented design
- Generates high precision bidirectional forces
- DC motor, equipped with an encoder
- Stable and constant maintenance of effort excluding energy
- Floating mount rod
- Effort: ± 30N
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: µAME 30 actuator
µAME 5 actuator
Miniature Effort Micrometric Actuator
- Generates high precision bidirectional forces
- DC motor, equipped with an encoder
- Stable and constant maintenance of effort excluding energy
- Floating mount rod
- Smallest actuator in our µAME range
- Effort: ± 5N
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: µAME 5 actuator
µAME 50 actuator
Micrometric force actuator
- Patented design
- Generates high precision bidirectional forces
- Stepper motor, direct current, equipped with an encoder
- Stable and constant maintenance of effort excluding energy
- Floating mount rod
- Effort: ± 50N
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: µAME 50 actuator
µAME 17 stepper motor actuator
Micrometric force actuator
- Patented design
- High resolution and high stability
- Minimum footprint
- Nanometric resolution
- Stepper motor
- Floating mount rod
- Effort: ± 17N
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: µAME 17 stepper motor actuator
µAME 7 actuator
Micrometric effort actuator
- Generates high precision bidirectional forces
- DC motor fitted with an encoder
- Stable and constant maintenance of effort excluding energy
- Floating mount rod
- Effort: ± 7N
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: µAME 7 actuator
AME 150N actuator
Micrometric effort actuator
- Stepper motor
- Reducer
- Bearings
- Worm-nut
- Spring
- Stainless steel
- Electronic control on request
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: AME 150N actuator
AME-30 actuator
Micrometric Effort Actuator
- High precision bidirectional efforts
- Stable and constant maintenance of effort excluding energy
- Floating mounting outlet rod: accepts angular and radial misalignment without generating parasitic friction
- Very low droop
- Developed effort: ± 30N
- Stroke: ± 100µm
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: AME-30 actuator
AME 20 actuator
Micrometric Effort Actuator
- Patented design
- High precision bidirectional efforts
- Stepper motor
- Maintaining stable and constant effort excluding energy
- Very low droop
- Floating outlet rod: accepts angular and radial misalignment without generating parasitic friction
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: AME 20 actuator
AEMDF 1000-5000 actuator
Micrometric electromagnetic actuator
- 2010 "Micron d’or" Laureate
- Generates high precision force or displacement controlled by dynamics
- Linear electromagnetic motor
- Guidance by deformable link: no parasitic friction, high precision and repeatability, no maintenance
- Compact
- Stroke: up to 2mm
- Effort: + 5N to -5N
- Accuracy in displacement: 2µm
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: AEMDF 1000-5000 actuator
µVMP35-100-60 positioner
Miniature positioner
- Small footprint
- Irreversible displacement
- Rod anti-rotation system
- Piloting in speed regulation
- Pushing force: up to 60N
- Resolution : 100nm
- Stroke: 35mm
- Mass: 250g
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: µVMP35-100-60 positioner
AEB 75 V1 actuator
Bistable Electromagnetic Actuator
- Provides 2 stable positions at high frequencies
- Design based on the use of two electromagnets
- Rectangular signal transformation in one movement thanks to the control electronics
- Possible use of different tools on the mobile part as needed
- Travel time: 3ms
- Minimum hold time 10ms
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: AEB 75 V1 actuator
