Micro-nano positioning

table de micro positionnement sur une table

TMP 25-200-50

Micro-positionning table
  • Travel : 25mm, translation movement non-reversible
  • UHV compatible
  • Step by step hybrid motor
  • Movement resolution : 225nm / motor step
Download datasheet
: TMP 25-200-50

Bender

Bi-directional 1D or 2D bending
  • Research on ultrathin chips
  • Property analysis under vacuum
  • Bi-directional 1D or 2D bending
Download datasheet
: Bender
interfaces-xy-robot-cristal-ispsystem

Micro-positioning stage XY 2-1000-10

XY stage sample holder
  • The XY positioner is made up of 2 translation stages (Tx and Ty)
  • Driven by a stepping moter (2 phases)
  • The translational movement generated
  • Prestressed linear ball guidance
Download datasheet
: Micro-positioning stage XY 2-1000-10

Vacuum chambers of PCNC

Soldered chambers
  • Chamber dimension: 8600 x 1600 x 3200 mm
  • Volume : 6m3
  • Internal pressure: 1.10-6 mbar
  • Leakage Rate: < 6.10-7 mbar.l/s
  • Manufacturing & control under CODAP V2000 cat B
Download datasheet
: Vacuum chambers of PCNC

Vacuum chamber

Multi-axis positioner Nanoscopium
  • 2 vacuum chambers
  • Inner Dimensions: 350 x 600 x370 mm& 450x 950 x490 mm
  • Equipped with 2 positioners with high accuracy (inside)
  • Positioner isolated from the chamber in order to dissociate the vibrations and thermal expansion
table-micro-positionnement-TMP16

µTMP 16

Miniature micro-positioning stage
  • Travel: 16 mm
  • Aluminum finish
  • Minimum dimensions: 40x40x18, tray 25x25
  • Application: whether or not to place a filter in a laser beam
Download datasheet
: µTMP 16
table-micro-positionnement-TMP32

µTMP 32

Compact micro-positioning stage
  • Minimum dimensions: 25x25x15 mm
  • Stroke: up to 20 mm
  • Resolution : 25nm (minimum)
  • Irreversible screw-nut system with backlash adjustment device
Download datasheet
: µTMP 32

Common Reference Gate

Optical suport
  • LMJ equipment
  • Position the Common Reference with great precision in the center of the experiment chamber
  • Equipped with a 6 DDL positioner
  • Compatible: secondary vacuum, contaminated environment
  • Resists EMC constraints
  • Safety management: safety PLC

Rotational stage

Rotational movements along 3 axes
  • Generates rotational movement along 3 axes in a small footprint
  • Equipped with a swivel plate actuated by 3 micrometric stops
  • Stops fitted with a 90 ° angle gear
  • Sensitivity of the rotational movement of 1µrad
  • +/- 1mm stroke on each adjustment axis
  • Available in motorized version
table-rotative-miniature-TRMA90

µTRM rotary stage

  • Micro stage
  • Hybrid stepper motor
  • Device: position stability without energy
  • Race: Multiturn
  • Resolution: 5µrad min
  • Speed: up to 20°/s
Download datasheet
: µTRM rotary stage
table-rotative-micrometrique

TRM rotary stage

  • Stepper gearmotor
  • Backlash device: position stability without energy
  • Race: multi-laps
  • Resolution: 5µrad min
  • Speed: up to 10°/s
Download datasheet
: TRM rotary stage
verin-micro-positionnement-applications-spatiales-VMP-60

VMP-60 Micro-positioning actuator

Space applications
  • High axial and radial stiffness
  • Thermo-mechanic stability
  • Driven by stepper motor
  • Compatible with particular environments: UHV, -80°C to + 60°C, CO² atmosphere, shocks, ...
  • Travel: 60mm
  • Résolution on displacement: 50nm / pas
Download datasheet
: VMP-60 Micro-positioning actuator

Stage TMP 4-50-200

Available with magnetic encoder
  • Load capacity: 50N
  • Stepper gear motor
  • Ball bearing without recirculation
  • Travel range: 4mm
  • Resolution: 50nm / motor step
  • ISO 6
  • Hardened Nuclear
Download datasheet
: Stage TMP 4-50-200

XSZ micro-positioning stage

3 axes: Tx Ts Tz
  • Precise positioning of optics or sensors
  • Composed of 3 stages: 2 translation stages (Tz and Tx) and 1 TMP actuator (Ts)
  • 2-phase hybrid stepper motorization: 200 steps/lap
  • Position stability excluding power supply
  • Each stage is equipped with an incremental linear encoder
Download datasheet
: XSZ micro-positioning stage

Stage TMP 29-25-200

Ultra rigid version
  • Load capacity : up 200N
  • Stepper gear motor
  • Linear recirculating ball bearing
  • Travel range: +/- 14.5mm
  • Resolution: 25nm / motor step
  • ISO 6
  • Hardened nuclear
  • Available for various strokes
Download datasheet
: Stage TMP 29-25-200

TMP ER 25-1000-50

Ultra low height
  • Irreversible linear motion
  • Stepper gear motor
  • Croosed roller ball bearing without recirculation: precise and smooth motion
  • Travel range : 25 mm
  • Resolution : 165nm / motor steps
  • XYZ configuration available
Download datasheet
: TMP ER 25-1000-50
Photo TMP-50-1000-100

Stage TMP 50-1000-100

XY configuration available
  • Hybrid stepper gear motor
  • Irreversible linear motion
  • Linear recirculating ball bearing: precise and smooth motion
  • Travel range: 50mm
  • Resolution: 625 nm/ motor step
Download datasheet
: Stage TMP 50-1000-100

TMP 135-6000-100 Translation stage

XYZ configuration available
  • Stepper gearmotor
  • Linear guide with recirculating balls
  • Stroke: 135mm
  • Resolution: 6.25 µm / motor step
  • Exists in different races
  • LMJ version available
Download datasheet
: TMP 135-6000-100 Translation stage
TMP-XY-400-4-1000

TMP XY 400-4-1000

  • 2 axis translation unit
  • Translation stage: Stroke: 400 mm // Straightness: +/- 10µm over 400mm
  • Stroke Micro positioning table: 2mm
  • Stroke: 2 mm
  • Accuracy: 1 µm
Download datasheet
: TMP XY 400-4-1000
table-motorisee-OEM

OEM motorized stage

Integration into an optomechanical device
  • Open loop stepper motorization
  • Stroke: 20mm
  • Weight 45g (excluding cable)
  • Possibility of XY or XYZ mounting
Download datasheet
: OEM motorized stage
TMR-30-20

TMR 30-20

Robotized micrometric stage
  • Translation movement in XYZ
  • Displacement by screw-nut system
  • Maximum stroke: 30mm
  • Maximum speed: 3 mm/s
  • Mass: 510g
Download datasheet
: TMR 30-20
TMR-150-100-Table-Motorisee-Etanche

TMR 150-100

Sealed motorized stage
  • Use in aggressive environments
  • Stroke: 150mm
  • Vertical load capacity: 100N
  • Horizontal load capacity: 400N
  • IP68 waterproof
Download datasheet
: TMR 150-100
photo table nano positionnement NLS 2 axes

NLS II : XY

Nanometric positioning stage
  • Motorization: electromagnetic motor without iron
  • Open or closed loop control
  • Compatible with vacuum and ultra-vacuum application (10-9 mbar)
  • Nanometric resolution
  • Straightness: 1µrad / ± 30 nm (5 nm stroke)
Download datasheet
: NLS II : XY

4 axis motion controller

DC motor with optical encoder
  • Absolute and relative move
  • Motion motor asserved on optical encoder integrated into the actuator
  • Limit switches (positive and negative) can be reversed or inhibited by software configuration
  • Power supply: +3.3V, +5V, -5V et +12V
  • Communication: CAN et RS485 ( ASCII)
  • Weight: 350g
Download datasheet
: 4 axis motion controller

2-axis control box

Stepper motors without encoder
  • Autonomic 2-axis system, controls up to 2 actuators
  • 4-wire bipolar stepper motors
  • Power supply: + 24V ± 10% (AC/DC converter supplied)
  • Dimensions: AC/DC converter: 50 x 115 x 35mm

Steering rack – CAN

CAN control
  • With incremental encoder reading & ENDAT
  • 16 stepper motors
  • CAN bus, Ethernet or USB control
  • Absolute and relative displacement
  • Motor advance in full or half steps
  • Bipolar type motor
  • Dimensions: 450mm x 3U x 210mm
Download datasheet
: Steering rack – CAN

Steering rack – PROFINET

PROFINET control
  • With incremental encoder reading and ENDAT
  • 12 stepper motors
  • Absolute and relative displacement
  • Motor advance in full or half steps
  • Bipolar type motor
  • Dimensions : 450mm x 3U x 210mm
Download datasheet
: Steering rack – PROFINET

AXOC multi-axis positioner

For focusing mirrors
  • KB positioner
  • Compact, high rigidity and high stability
  • Compatible with Ultra vacuum
  • 2 positioning systems: one with 6 axes and the second with 5 axes
  • Strocke: +/- 5mm
  • Resolution: 5µm
  • Accuracy: 10µm
Download datasheet
: AXOC multi-axis positioner

2-axis motion controller box

Stepper motor without encoder
  • Autonomic system with 2-axis controller
  • Each axis is independent and has an analog control input
  • Allows external position control
  • Ability to manage limit switch and original sensor
  • Dimensions: 290 x 180 x 120 mm
  • Communication: RS232 (ASCII frame)
  • Power supply: 85-240VAC / 50-60Hz
Download datasheet
: 2-axis motion controller box

Communication gateway

Profinet / IO to Can
  • Bidirectional interface gateway between PROFINET network and CAN bus
  • Evolutionary structure: great personalization to customer requests
  • Internal buffer: high speed data transmission
  • Power supply: 24VDC / 100mA (VDC)
  • Dimensions: Rackable Europe format 100 x 160 mm
Download datasheet
: Communication gateway

Control board

Stepper motor with encoder
  • Bipolar stepper motor with single axis encoder interface
  • Absolute and relative displacement
  • Motor displacement in full steps or half steps
  • Codeur incrémental ou absolu (ENDAT)
  • Power suppy: 24 V
  • Control card by CanOpen
Download datasheet
: Control board

Control board

2 stepper motors
  • Bipolar stepper motor
  • 2 limit switch inputs (positive and negative) which can be reversed
  • Control: CAN bus use with CanOpen protocol for control of cards
  • Control: USB gateway for control via a provided Window interface
  • European format (100 mm x 160 mm) rackable

2 axis controller

For stepper motor without encoder
  • Bipolar stepper motor
  • Limit switches (positive and negative can be reversed/deactivated)
  • Absolute and relative movement
  • Motor displacement full step, 1/2 step, 1/4 step or 1/16pas
  • Dimensions: 130 x 50 x 20mm
  • Power supply: + 12-24VDC ± 5% 3A
Download datasheet
: 2 axis controller

Ball joint 350-50

Ball joint 3 axes of movement
  • Liaises with moved items
  • Without backlash
  • Excellent mechanical strength ensuring support security
  • ISO 6
  • Available in reduced load version
  • Great stiffness along the 3 axes of movement
Download datasheet
: Ball joint 350-50

Nanoscopium multi-axis positioner

For focusing mirrors
  • Kinematics suitable for minimizing parasitic movements
  • Support and water cooling of mirrors
  • High rigidity and high stability
  • Compatible with Ultra Vacuum (UHV 10-10 mbar)
  • 5 DDL: 3 rotations and 2 translations
  • Stroke: ± 4mm
  • Resolution: < 100nm
Download datasheet
: Nanoscopium multi-axis positioner

3 axis positioner

For targets
  • High precision movements
  • Settings according to θX, θY et θZ
  • 2 orientation actuators and 1 rotation actuator
  • Stroke ±5° (θX, θY et θZ)
  • Resolution: 50µrad
  • Accuracy: ±50µrad
  • Cleanliness class (10, 100, 1000 or 10 000) and Vacuum (10-6 mbar)
Download datasheet
: 3 axis positioner

Insertor

Insert, position and orient an object in a vacuum enclosure
  • Equipped with a 6-degree positioner of high precision
  • Maximum mass of the object to insert: 2,5 kg
  • Vacuum operation
  • Electromagnetic and nuclear compatible hardening
Download datasheet
: Insertor
verin-miniature-micro-VMP4-100-60

µVMP4-100-60 positioner

Micro-positioner
  • Small footprint
  • Irreversible displacement
  • Rod anti-rotation system
  • Pushing force: up to 60N
  • Stroke: +/-2mm
  • Resolution: 100 nm
  • Compatible: UHV, baking 120°C
Download datasheet
: µVMP4-100-60 positioner

µVMR 4-15-5 positioner

Miniature electric positioner
  • Stroke: 15mm
  • Motorization: Coreless DC, 5 Vdc
  • Nominal speed: 3 to 5mm/s
  • Nominal force: 2N (in tension and in push)
  • Max force: 5N (in tension and in push)
Download datasheet
: µVMR 4-15-5 positioner

µVMR 7-20 actuator

Micro DC electric actuator
  • Small footprint
  • Stroke: 7mm
  • Rod anti-rotation system
  • Voltage from -5 to + 5Volts CC
  • CC Motoreductor
  • Rod Ø8
  • Tapping M4
Download datasheet
: µVMR 7-20 actuator
verin-miniature-micro-VMR20-50-12V

µVMR20-50 12V positioner

Robotic miniature positioner
  • Small footprint
  • Irreversible displacement
  • Rod anti-rotation system
  • Piloting in speed regulation
  • Pushing force: up to 100N
  • Maximum axial locking force: up to 70N
  • Stroke: 20mm
  • Compatible: all stainless steel, waterproof rod
Download datasheet
: µVMR20-50 12V positioner
verin-miniature-micro-VMR20-50

µVMR20-50 24V positioner

Robotic miniature positioner
  • Small footprint
  • Irreversible displacement
  • Rod anti-rotation system
  • Piloting in speed regulation
  • Pushing force: up to 60N
  • Stroke: 20mm
  • Resolution: 1.35µm par imp
  • Compatible: all stainless steel, waterproof rod

µAME 12 – Space actuator

Miniature effort micrometric actuator
  • Patented design
  • Generates high precision bidirectional forces
  • Coupling without parasitic friction
  • Stable and constant maintenance of effort excluding energy
  • Compatible with spatial constraints
  • Effort: ± 12N
Download datasheet
: µAME 12 – Space actuator

µAME 30 actuator

Micrometric force actuator
  • Patented design
  • Generates high precision bidirectional forces
  • DC motor, equipped with an encoder
  • Stable and constant maintenance of effort excluding energy
  • Floating mount rod
  • Effort: ± 30N
Download datasheet
: µAME 30 actuator

µAME 5 actuator

Miniature Effort Micrometric Actuator
  • Generates high precision bidirectional forces
  • DC motor, equipped with an encoder
  • Stable and constant maintenance of effort excluding energy
  • Floating mount rod
  • Smallest actuator in our µAME range
  • Effort: ± 5N
Download datasheet
: µAME 5 actuator

µAME 50 actuator

Micrometric force actuator
  • Patented design
  • Generates high precision bidirectional forces
  • Stepper motor, direct current, equipped with an encoder
  • Stable and constant maintenance of effort excluding energy
  • Floating mount rod
  • Effort: ± 50N
Download datasheet
: µAME 50 actuator

µAME 7 actuator

Micrometric effort actuator
  • Generates high precision bidirectional forces
  • DC motor fitted with an encoder
  • Stable and constant maintenance of effort excluding energy
  • Floating mount rod
  • Effort: ± 7N
Download datasheet
: µAME 7 actuator

AME-30 actuator

Micrometric Effort Actuator
  • High precision bidirectional efforts
  • Stable and constant maintenance of effort excluding energy
  • Floating mounting outlet rod: accepts angular and radial misalignment without generating parasitic friction
  • Very low droop
  • Developed effort: ± 30N
  • Stroke: ± 100µm
Download datasheet
: AME-30 actuator

AME 20 actuator

Micrometric Effort Actuator
  • Patented design
  • High precision bidirectional efforts
  • Stepper motor
  • Maintaining stable and constant effort excluding energy
  • Very low droop
  • Floating outlet rod: accepts angular and radial misalignment without generating parasitic friction
Download datasheet
: AME 20 actuator

AEMDF 1000-5000 actuator

Micrometric electromagnetic actuator
  • 2010 "Micron d’or" Laureate
  • Generates high precision force or displacement controlled by dynamics
  • Linear electromagnetic motor
  • Guidance by deformable link: no parasitic friction, high precision and repeatability, no maintenance
  • Compact
  • Stroke: up to 2mm
  • Effort: + 5N to -5N
  • Accuracy in displacement: 2µm
Download datasheet
: AEMDF 1000-5000 actuator

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