Micro-nano positioning / Multi-axis positioners

XSZ micro-positioning stage

3 axes: Tx Ts Tz
  • Precise positioning of optics or sensors
  • Composed of 3 stages: 2 translation stages (Tz and Tx) and 1 TMP actuator (Ts)
  • 2-phase hybrid stepper motorization: 200 steps/lap
  • Position stability excluding power supply
  • Each stage is equipped with an incremental linear encoder
Download datasheet
: XSZ micro-positioning stage

AXOC multi-axis positioner

For focusing mirrors
  • KB positioner
  • Compact, high rigidity and high stability
  • Compatible with Ultra vacuum
  • 2 positioning systems: one with 6 axes and the second with 5 axes
  • Strocke: +/- 5mm
  • Resolution: 5µm
  • Accuracy: 10µm
Download datasheet
: AXOC multi-axis positioner

EROS 3-axis positioner

Positioner for neutron detection device
  • Concept based on tri-glide kinematics
  • Adjustment of the detection system in relation to the samples measured
  • Mechanically welded aluminum alloy enclosure equipped with neutron shielding
  • Detection device composed of a single counter integrated on a 2-axis positioner and a fixed multi counter

3 axis positioner

For targets
  • High precision movements
  • Settings according to θX, θY et θZ
  • 2 orientation actuators and 1 rotation actuator
  • Stroke ±5° (θX, θY et θZ)
  • Resolution: 50µrad
  • Accuracy: ±50µrad
  • Cleanliness class (10, 100, 1000 or 10 000) and Vacuum (10-6 mbar)
Download datasheet
: 3 axis positioner

Nanoscopium multi-axis positioner

For focusing mirrors
  • Kinematics suitable for minimizing parasitic movements
  • Support and water cooling of mirrors
  • High rigidity and high stability
  • Compatible with Ultra Vacuum (UHV 10-10 mbar)
  • 5 DDL: 3 rotations and 2 translations
  • Stroke: ± 4mm
  • Resolution: < 100nm

Insertor

Insert, position and orient an object in a vacuum enclosure
  • Equipped with a 6-degree positioner of high precision
  • Maximum mass of the object to insert: 2,5 kg
  • Vacuum operation
  • Electromagnetic and nuclear compatible hardening
Download datasheet
: Insertor

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