Micro-nano positioning / Multi-axis positioners
5 axis Sample Holder
5 axis sample holder
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: 5 axis Sample Holder
Rotational stage
Rotational movements along 3 axes
- Generates rotational movement along 3 axes in a small footprint
- Equipped with a swivel plate actuated by 3 micrometric stops
- Stops fitted with a 90 ° angle gear
- Sensitivity of the rotational movement of 1µrad
- +/- 1mm stroke on each adjustment axis
- Available in motorized version
XSZ micro-positioning stage
3 axes: Tx Ts Tz
- Precise positioning of optics or sensors
- Composed of 3 stages: 2 translation stages (Tz and Tx) and 1 TMP actuator (Ts)
- 2-phase hybrid stepper motorization: 200 steps/lap
- Position stability excluding power supply
- Each stage is equipped with an incremental linear encoder
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: XSZ micro-positioning stage
AXOC multi-axis positioner
For focusing mirrors
- KB positioner
- Compact, high rigidity and high stability
- Compatible with Ultra vacuum
- 2 positioning systems: one with 6 axes and the second with 5 axes
- Strocke: +/- 5mm
- Resolution: 5µm
- Accuracy: 10µm
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: AXOC multi-axis positioner
Nanoscopium multi-axis positioner
For focusing mirrors
- Kinematics suitable for minimizing parasitic movements
- Support and water cooling of mirrors
- High rigidity and high stability
- Compatible with Ultra Vacuum (UHV 10-10 mbar)
- 5 DDL: 3 rotations and 2 translations
- Stroke: ± 4mm
- Resolution: < 100nm
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: Nanoscopium multi-axis positioner
3 axis positioner
For targets
- High precision movements
- Settings according to θX, θY et θZ
- 2 orientation actuators and 1 rotation actuator
- Stroke ±5° (θX, θY et θZ)
- Resolution: 50µrad
- Accuracy: ±50µrad
- Cleanliness class (10, 100, 1000 or 10 000) and Vacuum (10-6 mbar)
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: 3 axis positioner
Insertor
Insert, position and orient an object in a vacuum enclosure
- Equipped with a 6-degree positioner of high precision
- Maximum mass of the object to insert: 2,5 kg
- Vacuum operation
- Electromagnetic and nuclear compatible hardening
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: Insertor