Micro-nano positioning / Multi-axis positioners

Rotational stage

Rotational movements along 3 axes
  • Generates rotational movement along 3 axes in a small footprint
  • Equipped with a swivel plate actuated by 3 micrometric stops
  • Stops fitted with a 90 ° angle gear
  • Sensitivity of the rotational movement of 1µrad
  • +/- 1mm stroke on each adjustment axis
  • Available in motorized version

XSZ micro-positioning stage

3 axes: Tx Ts Tz
  • Precise positioning of optics or sensors
  • Composed of 3 stages: 2 translation stages (Tz and Tx) and 1 TMP actuator (Ts)
  • 2-phase hybrid stepper motorization: 200 steps/lap
  • Position stability excluding power supply
  • Each stage is equipped with an incremental linear encoder
Download datasheet
: XSZ micro-positioning stage

AXOC multi-axis positioner

For focusing mirrors
  • KB positioner
  • Compact, high rigidity and high stability
  • Compatible with Ultra vacuum
  • 2 positioning systems: one with 6 axes and the second with 5 axes
  • Strocke: +/- 5mm
  • Resolution: 5µm
  • Accuracy: 10µm
Download datasheet
: AXOC multi-axis positioner

Nanoscopium multi-axis positioner

For focusing mirrors
  • Kinematics suitable for minimizing parasitic movements
  • Support and water cooling of mirrors
  • High rigidity and high stability
  • Compatible with Ultra Vacuum (UHV 10-10 mbar)
  • 5 DDL: 3 rotations and 2 translations
  • Stroke: ± 4mm
  • Resolution: < 100nm
Download datasheet
: Nanoscopium multi-axis positioner

3 axis positioner

For targets
  • High precision movements
  • Settings according to θX, θY et θZ
  • 2 orientation actuators and 1 rotation actuator
  • Stroke ±5° (θX, θY et θZ)
  • Resolution: 50µrad
  • Accuracy: ±50µrad
  • Cleanliness class (10, 100, 1000 or 10 000) and Vacuum (10-6 mbar)
Download datasheet
: 3 axis positioner

Insertor

Insert, position and orient an object in a vacuum enclosure
  • Equipped with a 6-degree positioner of high precision
  • Maximum mass of the object to insert: 2,5 kg
  • Vacuum operation
  • Electromagnetic and nuclear compatible hardening
Download datasheet
: Insertor

All our products