Nanoscopium multi-axis positioner
For focusing mirrors
- Kinematics suitable for minimizing parasitic movements
- Support and water cooling of mirrors
- High rigidity and high stability
- Compatible with Ultra Vacuum (UHV 10-10 mbar)
- 5 DDL: 3 rotations and 2 translations
- Stroke: ± 4mm
- Resolution: < 100nm
Download datasheet
: Nanoscopium multi-axis positioner