Nanoscopium multi-axis positioner

For focusing mirrors
  • Kinematics suitable for minimizing parasitic movements
  • Support and water cooling of mirrors
  • High rigidity and high stability
  • Compatible with Ultra Vacuum (UHV 10-10 mbar)
  • 5 DDL: 3 rotations and 2 translations
  • Stroke: ± 4mm
  • Resolution: < 100nm
Download datasheet
: Nanoscopium multi-axis positioner