3 axis positioner
For targets
- High precision movements
- Settings according to θX, θY et θZ
- 2 orientation actuators and 1 rotation actuator
- Stroke ±5° (θX, θY et θZ)
- Resolution: 50µrad
- Accuracy: ±50µrad
- Cleanliness class (10, 100, 1000 or 10 000) and Vacuum (10-6 mbar)
Download datasheet
: 3 axis positioner