Precision frame / Soldered chambers

Vacuum chamber

Multi-axis positioner Nanoscopium
  • 2 vacuum chambers
  • Inner Dimensions: 350 x 600 x370 mm& 450x 950 x490 mm
  • Equipped with 2 positioners with high accuracy (inside)
  • Positioner isolated from the chamber in order to dissociate the vibrations and thermal expansion

Vacuum chambers of PCNC

Soldered chambers
  • Chamber dimension: 8600 x 1600 x 3200 mm
  • Volume : 6m3
  • Internal pressure: 1.10-6 mbar
  • Leakage Rate: < 6.10-7 mbar.l/s
  • Manufacturing & control under CODAP V2000 cat B
Download datasheet
: Vacuum chambers of PCNC

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