XSZ micro-positioning stage
3 axes: Tx Ts Tz
- Precise positioning of optics or sensors
- Composed of 3 stages: 2 translation stages (Tz and Tx) and 1 TMP actuator (Ts)
- 2-phase hybrid stepper motorization: 200 steps/lap
- Position stability excluding power supply
- Each stage is equipped with an incremental linear encoder
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: XSZ micro-positioning stage