XSZ micro-positioning stage

3 axes: Tx Ts Tz
  • Precise positioning of optics or sensors
  • Composed of 3 stages: 2 translation stages (Tz and Tx) and 1 TMP actuator (Ts)
  • 2-phase hybrid stepper motorization: 200 steps/lap
  • Position stability excluding power supply
  • Each stage is equipped with an incremental linear encoder