Below is an overview of our solutions in micro-nano positioning.

 

Stages

Micro-positioning stage: TMP

 

 

Micro-positioning stage ER 25-1000-50

Micro-positioning stage

 TMP 4-50-200

Available with magnetic encoder

TMP ER 25-1000-50

Ultra low height

TMP 29-25-200

Ultra rigid version

  • Load capacity: 50N
  • Stepper gear motor
  • Ball bearing without recirculation
  • Travel range: 4mm
  • Resolution: 50nm / motor step
  • ISO 6
  • Hardened Nuclear
  • Available with or without magnetic encoder
  • Irreversible linear motion
  • Stepper gear motor
  • Croosed roller ball bearing without recirculation: precise and smooth motion
  • Travel range: 25 mm
  • Resolution: 165nm / motor steps
  • XYZ configuration available
  • Load capacity : up 200N
  • Stepper gear motor
  • Linear recirculating ball bearing 
  • Travel range: +/- 14.5mm
  • Resolution: 25nm / motor step
  • ISO 6
  • Hardened nuclear
  • Available for various strokes
Download datasheet  Download datasheet  Download datasheet

 

Table de micro positionnement 50-1000-100

TMP 50-1000-100

XY configuration available

TMP 135-6000-100

XYZ configuration available

TMP XY 400-4-1000

 

  • Hybrid stepper gear motor
  • Irreversible linear motion
  • Linear recirculating ball bearing: precise and smooth motion
  • Travel range: 50mm
  • Resolution: 625 nm/ motor step       
  • Stepper gear motor
  • Linear recirculating ball bearing
  • Travel range: 135mm
  • Resolution: 6.25 µm / motor step
  • Available for various strokes
  • LMJ version available
  • 2 Axis translation set
  • Translation stage :
    – Stroke 400mm
    – Straightness +/- 10µm on 400mm
  • Micro nano positioning
    – Stroke 2mm
    – Precision : 1 µm
Download datasheet  Download datasheet Download datasheet
OEM motorised stage    

OEM motorised stage

   
  • To be integrated in an optomechanical device
  • Stroke : 20mm
  • Open Loop stepper motor
  • Mass : 45g (without cables)
  • Mounting XY or XYZ
   
Download datasheet    

Robotized micrometric stage: TMR

Robotized micrometric stage: TMR 20-30 sealed motorised stage TMR-150-100  

TMR 30-20

Motorized micrometric stage

TMR 150-100

Sealed motorised stage

 
  • Multi axis movements
  • Screw-nut system with spring backlash compensation
  • Travel range 30mm
  • Maximum speed 3mm/s
  • Mass: 510g
  • Use in agressive environment
  • Stroke: 150mm
  • Vertical loading capacity: 100N
  • Horizontal loading capacity: 400N
  • Sealing IP68
 

Download datasheet

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Miniature micro-positioning stage: µTMP (1 and 2 axes)

Table de micro positionnement miniature µTMP32 Table micro positionnement miniature µTMP16  Table micro positionnement miniature µTMP6-200-10

 µTMP 32

 µTMP 16

µTMP C-6-200-10

  • Minimum space: 25 x 25x 15mm
  • Travel range : up to 20mm
  • Resolution: 25nm min
  • Irreversible Screw nut with backlash compensation
  • Travel range: 16 mm 
  • Aluminium finish
  • Minimum space: 40 x 40 x 18, plate 25 x 25
  • Application: Filter positioning in a laser Beam
  • Travel range: 6mm (+/-3mm)
  • Load Capacity: 10N
  • Minimum footprint
  • UHV Version

Download datasheet

 Download datasheet

Download datasheet

two_axis_driver_board_micro_positioning_stage    

Two axis driver board micro-positioning stage

   
  • Hybrid Stepper motors
  • Irreversible motion
  • XY motion 100x100mm
  • Hollow tray 30x30mm
  • Positioning/scanning apllications
  • Associated with two axis stepper motor controller SD2124
   
Download datasheet    

Nano-positioning stage: NLS&TNP

 NLS_transparent  Table TNP XY  

 NLS II: On-the –Fly Scanning 

Nanoscale positioning

TNP XY 20-30-10-C

Configuration on two axis:XY

 
  • Motorisation: Voice-coil ; iron free
  • Control in open or closed loop
  • Compatible with high vacuum and ultra-high vacuum (10-10 mbar)
  • Nanoscale resolution
  • Straightness : 1µrad/ ±30 nm (5 nm travel)
  • Bipolar stepper motor with 400 step /turn
  • Ball Bearing without recirculation : precise and smooth motion without friction
  • Strength and stability
  • Travel range: 20mm
  • Resolution: 40nm
 

Download datasheet

Download datasheet

 

Rotary positioner: TRM

 Table Rotative Micrométrique (TRM)  TRMA_340_1_1500_HV.png  

TRM

 TRMA

 
  • Stepper Gear motor
  • Backlash compensation : stability even power off
  • Travel range : multiturn
  • Resolution: 5µrad min
  • Speed : up to 10°/s
  • Stepper motor
  • Load capacity : 1500N
  • Smooth and precise motion
  • Accuracy: 35µrad on 5°
  • Speed: 0.2°/s
 

Download datasheet

Download datasheet

 

Compact rotary positioner: µTRM

µTable micrométrique miniature (µTRM) µTRMA 360-1570-10    

µTRM

µTRMA 360-1570-10

 
  • Compact size
  • Resolution: 5µrad
  • Speed up to 20°/s
  • Stepper Gear motor
  • Backlash compensation : stability even power off
  • Stroke : multiturn
  • High precision reverse rotation
  • Small size
  • Speed : up to 15rpm
  • Resolution : 1.57 mrad/step
 

Download datasheet

Download datasheet

 

Compact electromagnetic and high frequency XY stage: µTMPxyHF_1000

   

µTMPxyHF

   
  • Compact positioning stage XY
  • High frequency
  • Electromagnetic 
  • Travel range: 1000 x 1000 µm
  • Resolution: 0.1µm
  • Frequency: up to 500 Hz
   

Download datasheet

   

Positioner

Micro-positioning actuators: VMP & VMR

Vérin micro positionnement 10-100-60 Vérin micro positionnement VMP40-6000-80  Vérin micro positionnement 10-100-60  Vérin mico positionnement VMP 30-30-P450

 VMP 10-100-60

VMP 40-6000-80

VMP 30-30-300

VMP 30-30-P450

  • Non-rotating rod
  • Stepper gear motor
  • Smooth and irreversible movement
  • Travel range: 10mm
  • Resolution: 0.054 µm/ motor steps
  • ISO 6
  • Also in version LMJ
  • Hybrid stepping motor
  • Non rotating rod
  • Travel range:35.75 mm
  • Resolution: 6.25µm/ motor step
  • ISO 5
  • Available in LMJ
  • Irreversible linear motion
  • Non rotating rod
  • Stepper Gear motor
  • Irreversible linear motion
  • Travel range: 30mm
  • Resolution: 55nm / motor step
  • ISO 5 cleanroom compatible
  • Stepper Gear motor
  • Travel range: 30mm
  • Resolution: 30 nm / motor step
  • Irreversible linear motion
  • Non rotating rod
  • Compatible with high vacuum atmosphere 

Download datasheet

Download datasheet

Download datasheet

Download datasheet

 Vérin de micro positionnement 30-50-100  Vérin micro positionnement VMP 60 Table micro positionnement pour Ballon sonde  Vérin micro positionnement VMP29-50-3800

VMP 30-50-100

VMP 60 

Space applications

VMP

vacuum & extreme temperatures compatible

VMP 29-50-3800

  • Hybrid stepper Gear motor
  • Irreversible linear motion
  • Non rotating rod
  • Accurate, light, strength, compact and stiff
  • Travel range: up to 35mm
  • Resolution: 5µm = 49 motor steps
  • High Axial & radial rigidity
  • Thermo-mechanical stability
  • Stepper Gear motor
  • Compatible with particular environment: UHV, -80°C to  +60°C
  • Travel range : 60mm
  • Resolution: 50nm / step
  • Optical linear encoder 50nm
  • resolution
  • Speed: > 12mm/s
  • Travel Range: 60mm
  • Axial Load : 10 to 50 N  – No Axial clearance
  • Operation from -60°C to  +60°C without heating or cooling with sensor integration  of temperature & heating strength 
  • Hybrid stepping Gear motor
  • Non rotating rod
  • Irreversible linear motion
  • Compatible to clean environment  (10 to    10 000) and vacuum      (10-6 mbar)
  • Travel Range: 29mm
  • Resolution: 0.05µm / motor step

Download datasheet

Download datasheet

Download datasheet

Download datasheet

Servo positioner VMR 65-1000-HT Electrical Positioner DC Reversible VMR 160-300-R    

VMR 65-1000-HT

VMR 160-300-R

Electrical Positioner DC Reversible

   
  • Servo control at high speed and accuracy
  • Motorization in harsh environments
  • Bidirectional forces up to 1000N at 40mm/s
  • Travel range 65 mm
  • Push or pull loads up to 300N
  • The piston rod is equipped with an anti-rotation system
  • Stroke 160 mm
  • Speed : 100mm/s
   

Download datasheet

Download datasheet

   

Compact micro-positioning actuator: μVMP

micro_positionning_actuator_µVMP4_100_60 micro_positioner_µVMP35_100_60

µVMP 4-100-60

µVMP35-100-60

  • Small footprint
  • Irreversible movement
  • Load:up to  60N
  • Travel range: +/-2mm
  • Resolution: 100 nm
  • Compatible: UHV, steaming 120°C
  • Non rotating system of the actuator rod
  • Small footprint
  • Irreversible movement
  • Non rotating rod
  • Velocity loop control
  • Load: up to 60N
  • Resolution: 100nm
  • Travel range: 35mm
  • Mass: 250g

Download datasheet

Download datasheet

Compact micro-positioning actuator: μVMR

micro_positionning_actuator_VMPR20_50_24V micro_positionning_actuator_VMPR20_50_12V c_micro_positioner_μVMR_7_20_HV

µVMR20-50 24V

µVMR20-50 12V

µVMR 7-20

  • Small footprint
  • Irreversible movement
  • Non rotating rod
  • Velocity loop control management
  • Travel range: 20 nm
  • Resolution: 1.35µm per imp
  • Compatibility: made of stainless steel, sealed rod
  • Small footprint
  • Irreversible movement
  • Non rotating rod
  • Velocity loop control management
  • Load :  up to  100N
  • Blocking Maximum axial force : 70N
  • Travel range: 20 nm
  • Compatibility: made of stainless steel, sealed rod
  • Small footprint
  • Travel range : 7mm
  • Non rotating rod
  • Power supply : -5 to + 5Volts
  • DC Gearmotor
  • Rod Ø8
  • Tapping M4

Download datasheet

Download datasheet

Download datasheet

Nano-positioning actuator: VNP

 Verin_nanometrique_positionnement    

 Nano-positioning actuator: VNP

(Patented technologie)

 

 

  • Create bidirectional movement of nanoscale precision while supporting high radial loads
  • Travel Range: ±25µm
  • Hysteresis: 1%
  • Vacuum
  • Stable unpowered
  • Cleanliness class: 100, 1 000 or 10 000
   

Download datasheet

   

Micrometric alignment actuator: VAM

VAM_verin_alignement_micrometrique_type_A  VAM-B_Verin_Alignement_Micrometrique_type_B VAM-C_Verin_alignement_micrometrique_type_C 

VAM 50-5000

Type A

VAM 50-5000

Type B

VAM 50-5000

Type C

  • Support solids without deforming them, with isostatic mounting : High axial stiffness and stability
  • Vertical travel range: 50 mm
  • Resolution: 5µm
  • Load capacity : Vertical Y (62.5kN), Radial Z (31% of the vertical load ), Radial X (15% of the vertical load)
  • Actuator weight: 94 Kg
  • ISO 8
  • Support solids without deform ing them, with isostatic mounting : High axial stiffness and stability
  • Vertical travel range: 50 mm
  • Resolution: 5µm
  • Load capacity : Vertical Y (13.5kN), Radial Z (150% of the vertical load ), Radial X (150% of the vertical load)
  • Actuator weight: 63 KG
  • ISO 8
  • Support solids without deforming  them, with isostatic mounting : High axial stiffness and stability
  • Vertical travel range: 50 mm
  • Resolution: 5µm
  • Load capacity : Vertical Y (30kN), Radial X and Z (50% of the vertical load limited to 5kN)
  • Actuator weight: 40 KG
  • ISO 8
Download datasheet  Download datasheet  Download datasheet
VAM-D_Verin_alignement_micrometrique_type_D  VAM-E_verin_alignement_micrometrique_type_E_ISP SYSTEM VAM-F_verin_alignement_micrometrique_type_F 

VAM 50-5000

Type D

VAM 50-5000

Type E

VAM 50-5000

Type F

  • Support solids without deforming them, with isostatic mounting : High axial stiffness and stability
  • Vertical travel range  maxi: 50 mm
  • Resolution: 5µm
  • Load capacity : Vertical Y (30kN), Radial Z (380% of the vertical load ), Radial X (100% of the vertical load)
  • Weight  actuator: 109KG
  • ISO 8
  • Support solids without deforming them, with isostatic mounting : High axial stiffness and stability
  • Vertical travel range: 50 mm
  • Resolution: 5µm
  • Load capacity : Vertical Y (27.5kN), Radial Z (150% of the vertical load ), Radial X (25% of the vertical load)
  • Actuator weight: 70KG
  • ISO 8
  • Support solids without deforming them, with isostatic mounting : High axial stiffness and stability
  • Vertical travel range: 50 mm
  • Resolution: 5µm
  • Load capacity : Vertical Y (48kN), Radial X and Z (50% of the vertical load limited to 9kN)
  • Actuator weight: 55 KG
  • ISO 8
Download datasheet Download datasheet  Download datasheet

Astatic actuator: VA

 VA_verin_astatique    

 Astatic actuator

   
  • Support solids by isostatic mounting
  • Vertical stress with constant function, adjustable with a minimum hysteresis
  • Height lockable position
  • Max vertical travel range : 63mm
  • Load capacity: 5KN, 15KN or 30 KN
   

Download datasheet

   

 

Actuators

Micrometric stress actuator: AME

micrometric_force_electrical_actuator_AME micro_force_electrical_actuator_AME30 force_actuator_AME_150N

AME 20

(Patented technologie)

 AME 30

(Patented technologie)

 AME 150N

Force Actuator

  • High accuracy Bi-directional force
  • Stepper motor
  • Position and force maintained unpowered
  • Very low droop
  • Floating head technology allows angular and radial misalignments with no friction
  • Load: 20N
  • High accuracy Bi-directional force
  • Position and force maintained unpowered
  • Floating head technology allows angular and radial misalignments with no friction
  • Very low droop
  • Load: ± 30N
  • Travel range : ±100µm
  • Stepper motor
  • Reducer
  • Bearing
  • Screw-nut system
  • Spring
  • Stainless Steel
  • Controller on demand

Download datasheet

Download datasheet

Download datasheet

 

 

Compact Micro Force Electrical Actuator: µAME

 

  Actionneur micrométrique d'effort miniature µAME17

 µAME 7

(Patented technologie)

 µ AME 17 Stepper motor

(Patented technologie)

 µ AME 17 Direct current

(Patented technologie)

  • High accuracy Bi-directional force
  • Stepper motor with encoder
  • Nanometric resolution
  • Position and force maintained unpowered
  • Floating head technology
  • Force: ± 7N
  • High resolution and high stability
  • Compact
  • Nanometric resolution
  • Position and force maintained unpowered
  • Stepper motor
  • Floating head technology
  • Force: ± 17N
  • High accuracy Bi-directional force
  • Direct current motor with encoder
  • Position and force maintained unpowered
  • Floating head technology
  • Force: ± 17N

Download datasheet

Download datasheet

Download datasheet

 

 Actuator µAME17 Actionneur µAME 5  Actionneur micrométrique µAME17

 µAME 50

(Patented technologie)

µAME 5

 

µAME 30

 

  • High accuracy Bi-directional force
  • Stepper motor, direct Current with encoder
  • Position maintained unpowered
  • Floating head technology
  • Force: ± 50N
  • High Precision bidirectional force
  • Stepper motor 
  • Position and force stable unpowered
  • Floating head technology
  • Smallest actuator of our range µAME
  • Stress: ± 5N
  • Provides high precision bidirectionnal force
  • Stepper motor with encoder
  • Position and force maintained even unpowered
  • Floating head technology
  • Force: ± 30N

Download datasheet

Download datasheet

Download datasheet

Actionneur micrométrique µAME17    

μAME12-SPACE

   
  • Provides high precision bidirectionnal force
  • Coupling without parasitic friction
  • Stepper motor with encoder
  • Position and force maintained even unpowered
  • Space compatible
  • .Force: ± 12N
   

Download datasheet

   

 

Micro Displacement and Micro Force Electromagnetic Actuator: AEMDF

Micro Displacement and Micro Force Electromagnetic Actuator: AEMDF

AEMDF 1000-5000

(Winner of the “Micron d’or” 2010)

  • Can be controlled in force or in displacement
  • Electromagnetic motor
  • Motion through deformable elements (no friction, no maintenance, perfect repeatability, no maintenance)
  • Compact
  • Travel range: up to 2mm
  • Force: +5N to -5N
  • Accuracy: 2µm

Download datasheet

High Frequency Electromagnetic Actuator: AEHF

actionneur electromagnétique de haute fréquence AEHF

AEHF

Linear Actuator HF

Open/Close valve,

Effort injection, …

  • Small dimension
  • High Frequency motion
  • Dispensing Head and electronic driver  provided upon request
  • Travel range: 150µm
  • Maximal Frequency: 1000 Hz
  • Compatible to harsh environment : air humidity, chocks, vibrations, dust

Download datasheet

Bistable Electromagnetic Actuator: AEB

 Bistable Electromagnetic Actuator AEB

AEB 75 V1

  • Get 2 stable positions at high frequency
  • Concept based on 2 antagonist electromagnets
  • Transformation of any rectangular signal in physical displacement thanks to its electronic driver card
  • All shapes of tools can be used on the mobile part as necessary
  • Displacement Duration: 3ms
  • Minimum holding duration : 10ms

Download datasheet

Multi axis positioner of focusing mirrors

Multi axis positioner  Multi axis positioner AXOC 

Multi axis positioner 

of focusing mirrors

Multi axis positioner 

of focusing mirrors -KB

  • Adapted Kinematics to the reduction of any interference movement
  • Supporting and cooling of the mirrors by water
  • High stiffness and stability
  • Compatible with very high vacuum (UHV 10-10 mbar)
  • 5 DDL: 3 rotation and 2 translations
  • Travel range: ± 4mm
  • Resolution: < 100nm
  • Positioner KB mirrors
  • Compact, High stiffness and stability
  • Compatible with very high vacuum
  • 2 positioning systems: one at 6 axis (3 translations, 2 rotations and 1 manual rotation) // the 2d at 5 axis (2 translations, 1 rotation and 2 manual rotations)
  • Travel range: +/- 5mm
  • Resolution: 5µm
  • Accuracy: 10µm

Download datasheet

 Download datasheet

Positioner 3 axis  Positionneur trois axes et son enceinte

 Positioner 3 axis

for target

Positioner 3 axis

for neutron detection device

  • High accuracy movement
  • Setting as per θX, θY and θZ
  • 2 positioning actuators and 1 rotation actuator
  • Travel range ±5° (θX, θY et θZ)
  • Resolution: 50µrad
  • Accuracy: ±50µrad
  • Cleanliness Class (10, 100, 1000 ou 10 000) 
  • Vacuum compatible (10-6mbar)
  • Based on kinematic tri-glide type
  • Setting of the detection system by the measured samples
  • Mecano welded enclosure in aluminum alloy equipped of a neutron shielding
  • Detection device with a mono counter integrated in on 2 axis positioner and a fixed multi- counter

Download datasheet

Download datasheet

Ball joint mount

Rotule 350-50    

Ball joint mount  350-50

3 motion AXIS

   
  • Link between the displaced elements
  • No backlash
  • Excellent mechanical intrinsic strenght providing security support
  • ISO 6
  • Reduced load version available
  • High stiffness according to 3 axes of motion
   

Download datasheet

   

Board

plateau_planimétrique_PPR2-2-2-7000-1-0-0 plateau_planimétrique_PPR2-2-2-14200-35-0-171    

Planimetric board

PPR 2-2-2-7000-1-0-0

Planimetric board

PPR 2-2-2-14200-35-0-171

 

 

  • Freedom in high accuracy of rotation and translation
  • Supporting stress compliant to axis up to 7000N
  • Reliable and robust
  • Compatible with clean room
  • Dimension: 250x200x150 (mm3)
  • Freedom in high accuracy of rotation and translation
  • Supporting stress compliant to axis up to 14200N
  • Reliable and robust
  • Compatible with clean room
  • Dimension: 490x480x190 (mm3)
   

Download datasheet

Download datasheet

 

 

Driver

Control board for CC motorization & stepper motor

carte_OEM_ controleur-2_axes Controleur_2_axes_moteur_pas_a_pas  Carte commande moteur pas à pas 

2 axis controller

Stepper motor without encoder

Control board

2 stepper motor

Control board

stepper motor with encoder

  • Bipolar stepper motor
  • Limit (positive and negative can be reversed or deactivated)
  • Absolute and relative motion
  • Motor motion by full step,1/2 step , 1 / 4 step or 1/16 step
  • Dimension: 130x 50x 20mm
  • Power supply : +12-24VDC±5%3A
  • Bipolar Stepper motor
  • 2 inputs Limit (positive and negative can be reversed or deactivated)
  • Control : Using  bus CAN with CanOpen protocol pilot  for Control board
  • Control: Gateway USB for control via a provided window interface
  • Europe Size (100mm x 160mm) rackable
  • Bipolar stepper motor with mono axes interface encoder
  • Absolute and relative motion
  • Motion by full steps or half steps motor
  • Incremental or absolute encoder.
  • Power supply: 24 V
  • Board control with  CanOpen

Download datasheet

 Download datasheet

 Download datasheet

Controleur 4 axes moteur courant continue avec codeur    

4 axis controller

DC Motor with encoder

   
  • Absolute and relative motion
  • Movement of the servomotor on optical encoder integrated to the actuator Stroke limit  (positive  and negative) can be reversed or deactivated by software setup
  • Power supply : +3.3V, +5V, -5V et +12V
  • Communication: CAN and  RS485 ( ASCII)
  • Weight:350 g
   

Download datasheet

 

 

Gateway

Passerelle de communication Profinet / IO - to - CAN      

Communication gateway

Profinet / IO to Can

   

 

 

  • Bidirectional interface gateway between PROFINET networks and CAN BUS 
  • Evolving structure Customized upon client’s request
  • Power supply: 24VDC / 100mA (VDC)INTERFACE
  • Dimension: Format Europe rackable 100 x160 mm
  • Transmission of high speed data
     

Download datasheet

   

 

Control rack

Double rack pilotage CAN Rack profinet 12 moteur pas à pas  boitier_pilotage

Control rack

CAN control

Control rack

PROFINET control

 Control unit

stepper motor without encoder

  • With incrémental encoder reading & ENDAT
  • 16 steppers motors
  • Controled by CAN bus, Ethernet ou USB
  • Absolute and Relative movement
  • Full or half step motor
  • Bipolar motor
  • Dimensions 450mm x 3U x 210mm
  • With incrémental encoder reading & ENDAT
  • 16 steppers motors
  • Controled by Profinet
  • Absolute and Relative movement
  • Full or half step motor
  • Bipolar motor
  • Dimensions 450mm x 3U x 210mm
  • Stand-alone system with two axis controller
  • Each axis is independent  & Analog control input : external servo position
  • Dimension: 290 x 180 x 120mm
  • Communication: RS232 (ASCII  frame)
  • Power supply : 85-240VAC/50-60Hz
  • Ability to manage limit  stroke sensor & regular sensor

Download datasheet

Download datasheet

Download datasheet

Control Unit Stepper motor without encoder    

Control Unit

Stepper motor without encoder

   
  • Two axis self-system, drive up to 2 actuators
  • Bipolar stepper motor – 4 Wires
  • Power supply : +24V ±10% (AC/DC converter supplied)
  • Dimensions : AC/DC converter: 50 x 115 x 35mm
   

Download datasheet

   

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